The distribution of O and N in the surface region of laser-patterned titanium revealed by atom probe tomography

Direct Laser Interference Lithography (DLIL) has shown to be a promising technique chemically and physically alter the surface of titanium. In this work, atom probe tomography analysis was performed on DLIL-treated titanium obtain chemical composition in maxima minima interference positions. The revealed that multilayer structure consisting oxide/oxynitride is formed at both positions; however, altered differently between two. observed difference believed due an uneven heating temperature distribution, which demonstrated by thermal simulations.